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Verionix Gas analyzer
Verionix 가스분석장치는 반도체, LCD, LED등의 제조업체에서 생산 공정에 사용되는 각종
특수 Gas를 자체 플라즈마 발생 장치를 사용하여 분석하는 장치로써 장비의 Exhaust Line에
설치하여 잔류가스를 분석하는 기기로써 반도체, LCD, LED 생산 LINE에 적합한 장치입니다.
또한 Space를 거의 차지하지 않는 Compact Design으로 복잡한 반도체 Line에서 특히
각광 받고 있읍니다.
Semiconductor, LCD, LED, LD, process gas metrology, fault detection !!!
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Verionix gas sensors provide real-time and fully-programmable compositional characterization of single or multi-species gases and gas streams. They operate at pressures from 10 milliTorr to 15 psig without need for auxiliary pumps or orifices required by more traditional methods. Verionix sensors also accurately detect gas species that other methods can't, including Inerts and nobles (such as Helium, Argon and Xenon) Diatomics (including N2 and O2) and many corrosive species, including fluoride and cloride-based gases.
Two product families are offered, along with a complement of software and accessories to make their use and integration easy.
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The Vx-3100 is ideal for measuring gas composition in high pressure environments from 1 Torr to 15 psig, (2 ATM), depending on gas species.
The Vx-2200 is suited for lower pressure vacuum environments from 10 milliTorr to 1 Torr.
To learn more, click on a product image or tab above.
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www.verionix.com | |
주소 : 경기도 수원시 팔달구 매교동 매교상가 A-115호 우편번호 : 442-844
Address : A-115 ho Maegyo Sangga Maegyo-Dong 161 Paldal-Gu Suwon-si Gyeonggi-Do. Korea 442-844
TEL : 82-31-233-2120. FAX : 82-31-233-2140
Copyright : JS TECHⓡ
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